Kinetic roughening of vicinal Si ( 001 )

نویسنده

  • A. van Silfhout
چکیده

The kinetic roughening behavior of vicinal Si(OO1) surfaces is studied with scanning tunneling microscopy. By analyzing the height-height correlation function of the Si layers that have been grown we found, in the case of islands growth, an algebraic roughening behavior with a roughness exponent of 0.68 * 0.05. In the step flow mode, however, we found non-algebraic roughening behavior.

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تاریخ انتشار 2002